JPS6274329U - - Google Patents
Info
- Publication number
- JPS6274329U JPS6274329U JP16680085U JP16680085U JPS6274329U JP S6274329 U JPS6274329 U JP S6274329U JP 16680085 U JP16680085 U JP 16680085U JP 16680085 U JP16680085 U JP 16680085U JP S6274329 U JPS6274329 U JP S6274329U
- Authority
- JP
- Japan
- Prior art keywords
- particle beam
- density
- beam source
- target
- relatively
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims 8
- 238000010586 diagram Methods 0.000 description 3
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16680085U JPS6274329U (en]) | 1985-10-30 | 1985-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16680085U JPS6274329U (en]) | 1985-10-30 | 1985-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6274329U true JPS6274329U (en]) | 1987-05-13 |
Family
ID=31098120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16680085U Pending JPS6274329U (en]) | 1985-10-30 | 1985-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6274329U (en]) |
-
1985
- 1985-10-30 JP JP16680085U patent/JPS6274329U/ja active Pending
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